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ADVANCED SOURCES
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- Excimer Sources
Excimer sources provide narrow band light around
a single wavelength. Lamps operating at
wavelengths of 126, 146, 172, 222, 282, and 308
nm are available.
- Electron Beam (EB) Sources
EB sources provide electron beams with
potentials of 50-80 keV. These units are
compact, self-shielding, and can be integrated
into “in-line” process applications.
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