|
|
 |
 |
|
|
|
CORE TECHNOLOGIES
|
Excimer Lamps
The design and production of excimer lamps requires
an understanding of the plasma physics and material
sciences coupled with the ability to fabricate the
structures under very clean processing conditions.
Additionally, the output is in large part determined
by the characteristics of the power supply
electronics.
The wavelengths produced depend on the components of
the gas mixtures used. Please contact us at
TPDInfo@ushio.com
to understand more about the design choices possible
and how these choices can impact the application
opportunities.
Electron Beam Tubes and Modules
The EB tube design is enabled by the fabrication of
very thin windows that can allow electrons to pass
with minimal difficulty. Electrons are provided by a
filament structure and accelerated toward the
window. The construction of the EB source as well as
the generation and control of the high potentials
require substantial attention to detail if stable
operation is to be maintained. The source require
operating modules that provide appropriate cooling,
insulation, and shielding from the X-rays. Please
contact us for additional information.
|
 |
|
|
