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EXCIMER SOURCES
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Excimer sources
provide narrow band light around a single
wavelength. Lamps operating at wavelengths of 126,
146, 172, 222, 282, and 308 nm are available. USHIO
provides a wide variety of products covering basic
research tools, standard sources, and integrated
systems optimized for your specific production
requirements.
- Wide area sources
- Spot sources
- Integrated systems
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Feature |
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Benefit |
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Powerful radiation in
ultraviolet and vacuum ultraviolet spectral
range |
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Allows photochemical
processes that were previously not possible
with lamps |
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Single, narrow band
wavelengths |
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Supports selected
reactions with specificity not available from
broadband sources
Very efficient source of energy at the operating
wavelength |
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Low temperature operation |
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Generates minimal
infrared radiation, and allows processing of
temperature sensitive substrates |
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Highly efficient source |
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Converts power
into light energy effectively, reducing power
requirements and heat load |
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Instant On/Off |
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Provides precise
exposure control without mechanical devices
Requires no warm-up or cool down time |
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Multiple geometries |
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Radiation can
be directed inwards or outwards
Spot and wide area coverage designs are feasible |
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