|
|
 |
 |
|
|
 |
DISCOVER THE INNOVATIVE APPLICATIONS OF EXCIMER
LAMPS AND LVEB DEVICES.
|
USHIO is a
world-class provider of Electron Beam systems,
Excimer lamp systems and selected specialty purpose
lamps for sophisticated uses.
The Technical Products Division (TPD) of USHIO
America, Inc. offers Excimer & EB sources, the
capabilities for adapting them for your industrial,
scientific & medical purposes, along with the
engineering & integration resources to provide
systems suitable for advanced manufacturing
environments.
Our mission is to provide and support the adaptation
of Excimer and Electron Beam sources into industrial
processes. We develop and manufacture sources,
conduct application development efforts, and provide
engineering options for clients interested in
testing concepts or adapting the technology to their
specific requirements.

|
Excimer Sources
Excimer sources provide narrow band light
around a single wavelength. Lamps operating
at wavelengths of 126, 146, 172, 222, 282,
and 308 nm are available. |
 |
Electron Beam (EB) Sources
EB sources provide electron beams with
potentials of 50-80 keV. These units are
compact, self-shielding, and can be
integrated into “in-line” process
applications. Higher power sources are also
available |
|
|