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SEMICONDUCTOR AND ELECTRONICS
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Excimer light sources are being applied or
investigated for use in many process areas of the
semiconductor and electronics industries. The uses
for EB sources are just beginning to become
established for innovative processes enabled by
their surface modification effects.
- Reticle cleaning
- Photo-assisted CVD
- Advanced wafer cleaning
- Soft ashing
- Surface modification
- LCD & OLED yield improvement
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