We can provide competent integration of both excimer and EB sources into systems and subsystems for advanced processing environments. Capabilities include providing automated exposure controls, gas, & fluid handling, sample positioning, and extensive safety features. We can provide systems that comply with the relevant industry and government standards as required. We work collaboratively to meet your schedules reliably.


Ultraviolet Manual Cleaning Tool

A good example of our System Integration expertise is the Ultraviolet Manual Cleaning Tool we developed for one of the world's leading semiconductor chip manufacturers.

The Ultraviolet Manual Cleaning Tool (UVMCT) is a system consisting of a sample compartment, an Ushio Cimax 200 custom built lamp-house, gas handling and safety sub-systems. It features a front-opening door to allow the manual placement of reticles (chrome side down) for UV exposure at various fixed distances from the lamp house window. Controls to regulate the oxygen concentration within the primary nitrogen environment and set the UV exposure time are provided. Working distances between the reticle and the lamp-house window may be varied through the use of interchangeable sample supports.