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We can provide competent integration of both
excimer and EB sources into systems and subsystems
for advanced processing environments. Capabilities
include providing automated exposure controls, gas,
& fluid handling, sample positioning, and extensive
safety features. We can provide systems that comply
with the relevant industry and government standards
as required. We work collaboratively to meet your
schedules reliably.
Ultraviolet Manual Cleaning Tool
A good example of our System Integration expertise
is the Ultraviolet Manual Cleaning Tool we developed
for one of the world's leading semiconductor chip
manufacturers.
The Ultraviolet Manual Cleaning Tool (UVMCT) is a
system consisting of a sample compartment, an Ushio
Cimax 200 custom built lamp-house, gas handling and
safety sub-systems. It features a front-opening door
to allow the manual placement of reticles (chrome
side down) for UV exposure at various fixed
distances from the lamp house window. Controls to
regulate the oxygen concentration within the primary
nitrogen environment and set the UV exposure time
are provided. Working distances between the reticle
and the lamp-house window may be varied through the
use of interchangeable sample supports.
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