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EXCIMER LAMP SYSTEM
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Excimer sources
provide narrow band light around a single wavelength. Lamps
operating at wavelengths of 126, 146, 172, 222, 282, and 308
nm are available.
USHIO provides a wide variety of products covering basic research
tools, standard sources, and integrated systems optimized for
your specific production requirements.
- Concept evaluation tools
- Wide area sources
- Spot sources
- Integrated systems
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Feature |
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Benefit |
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Powerful radiation in ultraviolet
and vacuum ultraviolet spectral range |
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Allows photochemical
processes that were previously not possible with lamps |
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Single, narrow band wavelengths |
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Supports selected reactions
with specificity not available from broadband sources
Very efficient source of energy at the operating wavelength |
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Low temperature operation |
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Generates minimal infrared
radiation, and allows processing of temperature sensitive
substrates |
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Highly efficient source |
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Converts power into
light energy effectively, reducing power requirements
and heat load |
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Instant On/Off |
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Provides precise exposure
control without mechanical devices
Requires no warm-up or cool down time |
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Multiple operating positions |
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Lamp can be operated
in any orientation, providing system design flexibility |
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Multiple geometries |
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Radiation can be directed
inwards or outwards
Spot and wide area coverage designs are feasible |
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