UV-LED Units
For Wafer Processing
Hardening photoresist and coating curved lens surfaces.
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Features & Benefits
- Ushio’s unique lens design miniaturizes systems by 56% while increasing energy efficiency over standard devices (in the 200 mm type case).
- Because there is almost no illuminance reduction, no fine adjustment is needed for work at varying thickness when the irradiation distance deviates slightly from 50 mm.