Ushio’s UX-4 projection aligner is now available with a mercury-free LED light source that delivers lamp-level intensity. The result is full throughput on high-dose layers, lower running costs, and an easier path to environmental compliance.
Ushio’s UX-4 projection aligner is now available with a mercury-free LED light source that delivers lamp-level intensity. The result is full throughput on high-dose layers, lower running costs, and an easier path to environmental compliance.