Ushio’s proprietary large-area projection lens technology cultivated through our capital equipment from many years of expertise in light source and optical technology. High productivity is achieved while realizing the high resolution and overlay accuracy required for the latest packaging substrates.
 | Charge Neutralization Systems Capital Equipment Visit Product Page |
 | UFX Series Roll to Roll Lithography Tool Visit Product Page |
 | Unihard UV Photoresist Curing System Visit Product Page |
 | UX-1 Series Manual Type Contact-Proximity Aligners Visit Product Page |
 | UX-3 Series Contact-Proximity Aligners Visit Product Page |
 | UX-4 Series Full Field Projection Aligner Visit Product Page |
 | UX-5 Series Panel-Level Large Field Stepper Visit Product Page |