We will exhibit at “SEMICON West 2026”, held at the Moscone Center in San Francisco, California, from October 13th to October 15th, 2026.
We will showcase the latest information on our Lithography Technologies, including Panel-level Stepper, Full-field Projection Aligner and Interference Lithography Tool. Please visit our booth! We are looking forward to seeing you there!
▼ SEMICON West 2026 Official URL
Ushio Booth
| Open period | October 13 (Tue.) to October 15 (Thu.), 2026. |
| Venue | Moscone Center | San Francisco, CA |
| Booth No. | #752 |
| Official URL | https://www.semiconwest.org/ |
Exhibit Details
Large-Area Projection Lithography System; UX-4, UX-5 series
Non-contact and large shot-size, capable of high productivity.
The lithography tools utilize Ushio’s robust lighting and optical technologies, along with unique large-area projection lens technology.
- The UX-4 is capable of processing up to 8-inch wafers with non-contact and one shot per wafer. This enables exposure on warped wafers using a greater depth of focus, which achieves higher productivity and better yield than proximity aligners.
- The UX-5 is designed as a stepper projection lithography tool for advanced packaging substrates, which is capable of exposing full-size (510 x 515 mm) substrates in four shots. You will be able to learn about the latest stepper lithography tool for advanced packaging that achieves a resolution of L/S=1.5µm with exposure field of 100 mm x 100 mm or more per shot. Please visit our booth and get in touch with our staff for more details.
【Key Technologies】
- Equipped with the world’s leading high-pressure UV lamp
- Unique illumination optical system boasting high uniformity
- Outstanding large-area projection lens
- Large depth of focus for stable patterning
- Large shot size enables high productivity