Excimer lamps use noble gases in a coated quartz chamber to emit precise vacuum-ultraviolet (VUV) wavelengths. When high-energy electrons create a plasma discharge, the gas atoms form excited dimers that release UV light in nanoseconds. This UV light interacts with oxygen to generate ozone, which breaks surface molecular bonds and modifies the top layer of the substrate. Ushio’s lamps emit UV-C light with 172 nm, with the exact wavelength determined by the gas mixture.
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| Series | Name | Image | Irradiation Size (mm) | Irradiation Size (in) | Irradiation Intensity (mW/cm2) |
|---|---|---|---|---|---|
| Excijet | Excijet 55-130 |  | 130 x 90 mm | 5.11 x 3.54 in | 20 mW/cm2 |
| HPV | HPV |  | 510 – 3000 mm | 20.08 – 118.11 in | 170 mW/cm2 |
| HPV-ST | STA3-314, STA5-314, STA5-314, STN5-314 |  | 300 – 550 mm | 11.81 – 21.65 in | 170 mW/cm2 |
| 4 inch | SSP04A-314, SSP04V-314 |  | 100 x 100 mm | 3.94 x 3.94 in | 18 – 20 mW/cm2 |
| 6 inch | SSP06S-314 (200-240 volts), SSP06S-317 (100-110 volts) |  | 170 mm x 170 mm | 6.61 in – 6.69 x 6.69 in | 12 – 13 mW/cm2 |
| 8 inch | SSP08S-314 (200-240 volts), SSP08S-317 (100-110 volts) |  | 230 x 230 mm | 8.98 in – 9.06 x 9.06 in | 15 – 50 mW/cm2 |
| 12 inch | SSP12S-192 |  | 340 x 340 mm | 13.39 x 13.39 in | 50 mW/cm2 |
| 6 – 12 in with chamber | SVK111, SVK121, SVK222, SVK232 |  | 170 x 170 mm – 340 mm x 340 mm | 6.69 x 6.69 in – 13.39 x 13.39 in | 13 – 50 mW/cm2 |
Yes, we recommend wearing light-shielding eyewear. Light at 172 nm is rapidly attenuated in air, but longer-wavelength light is also emitted at about 1/100th of the intensity at 172 nm. While there is little effect at low illuminance, at high illuminance or for long-term operation, light-shielding eyewear is advisable.
Requirements vary by model. Some systems require N₂, some see improved efficiency with it, and others do not need it. Please provide your usage environment, processing speed, and other conditions so we can recommend the most suitable system.
Common handling methods include drafters and local exhausting of the processing space through ducts. Purge gas in the lamp-housing/process space also needs to be exhausted. Regarding safety-related specifications, please observe the installation precautions and contact our sales representative for details.
Yes, we do. Experiments and evaluations are conducted at our laboratory in Chandler, Arizona and Himeji City, Japan. In Japan, we have analytical systems such as SEM, XPS, and FT-IR, allowing surface analysis at lower cost than external evaluation institutions. Immediate analysis after irradiation is another advantage, preventing changes that may occur if the surface is left exposed.
Yes, irradiation in air can achieve a cleaning effect. However, if the distance between the lamp and the target is too large, the light is attenuated, reducing effectiveness. For experiments, we recommend an irradiation distance of about 2 to 4 mm. By controlling the oxygen concentration, it is possible to extend the irradiation distance and irradiate three-dimensional objects.
For atmospheric air (oxygen concentration of 21%), an irradiation distance of approximately 2 to 4 mm is recommended. Optimal parameters must be determined when changing oxygen concentration or extending the irradiation distance.
Address: 4360 W Chandler Blvd #1, Chandler, AZ 85226
Hours: 9:00 AM – 5:00 PM, Monday through Friday
Closed Saturday and Sunday
Located in Chandler, Arizona within the greater Phoenix area, our Arizona Demo Lab provides a dedicated environment for evaluation, customer support, and technical development of Ushio products, including excimer equipment.
A Class 10,000 clean room area houses two types of excimer demo units for testing with customer samples. Our laboratory is equipped with microscopes, a sub-micron CD measurement tool, and a granite surface plate. This setup helps streamline installation support, and after-sales service.
The lab operates as an open demo facility, and customers are welcome to schedule an appointment to evaluate their applications. Discover the testing capabilities and explore an overview of the equipment and specifications available at our Arizona Demo Lab below.
| Item | Model | Specification |
|---|---|---|
| Portable Clean Room | SW-P121208 | Class 10,000 (ISO 7) |
| 172-nm Excimer Irradiator | SUS796K | 200 x 60 mm, Approx. 60 mW/cm2 |
| 172-nm Excimer Irradiator | SUS06 + Vacuum Chamber | 100 x 100 mm, Approx. 10 mW/cm2 |
| 172-nm Excimer Irradiator | Min-Excimer No.X | 78 x 49 mm, Approx. 10 mW/cm2, Portable |
| Oxygen Concentration Meter | OX400 | |
| Oxygen Concentration Meter | FD-90A-02-PUMP | Portable |
| Nitrogen Supply | – | 99.99% Nitrogen |
| Dry Air Compressor | 10020HDSPCADC | 98% Dry Air |
| Dry Air Compressor | 20040DSPCADC | 98% Dry Air |
| Contact Angle Measurement | – | Hand-made water drop tool |
| Optical Microscope | MX63L | |
| Optical Metrology Tool | Nexiv S6555 | Pattern matching, Size/distance measurement |
| Photolothography Developer | AD-3000 | Up to 300mm wafer/panel |
| Fume Hood | FH1000X | |
| Granite Surface Table | – | 48 x 48 inch, flat surface |