Roll to Roll Lithography Tool
Currently Ushio’s proximity/projection exposure systems for flexible substrates have a track record of over 800 units. Highly efficient high-resolution exposure is achieved by a projector lens that makes full use of our specially developed high-output lamp and our established reputation in optical system technology.
– Includes the world’s number one super high-pressure UV lamp
– Our own irradiation optical system boasting a high degree of uniformity
– Unrivaled large-area projector lens
Features & Benefits
- Applicable to thin, wide tape
Supports up to 165 mm, 25 µm (Pl) thin tape
- Features large-diameter projection lenses
Ushio’s unique large-diameter projection lenses achieve dramatic yield improvements and higher throughput.
- Large depth of field
This equipment also accommodates thick photoresist films and deformed tapes.
- Auto zoom function
This equipment is able to handle tape expansion and contraction and achieves a high level of overlay accuracy.
- Touch panels
- Two-metal COF
- TAB and more
|Model||Exposure Area||Roll Width||Resolution||Alignment Accuracy||Wavelength|
|UFX-2238||□140 mm||to 160 mm||12 µm L/S||±7 µm||ihg line|
|UFX-2468||□140 mm||to 160 mm||7 µm L/S||±7 µm||ih line|
|UFX-2477||□140 mm||to 160 mm||4 µm L/S||±7 µm||i line|