UFX Series
Roll to Roll Lithography Tool
Currently Ushio’s proximity/projection exposure systems for flexible substrates have a track record of over 800 units. Highly efficient high-resolution exposure is achieved by a projector lens that makes full use of our specially developed high-output lamp and our established reputation in optical system technology.
Component Technology
– Includes the world’s number one super high-pressure UV lamp
– Our own irradiation optical system boasting a high degree of uniformity
– Unrivaled large-area projector lens
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Features & Benefits
- Applicable to thin, wide tape
Supports up to 165 mm, 25 µm (Pl) thin tape
- Features large-diameter projection lenses
Ushio’s unique large-diameter projection lenses achieve dramatic yield improvements and higher throughput.
- Large depth of field
This equipment also accommodates thick photoresist films and deformed tapes.
- Auto zoom function
This equipment is able to handle tape expansion and contraction and achieves a high level of overlay accuracy.
Applications
- COF
- T-BGA
- FPC
- Touch panels
- Two-metal COF
- TAB and more
Specifications
| Model | Exposure Area | Roll Width | Resolution | Alignment Accuracy | Wavelength |
|---|---|---|---|---|---|
| UFX-2238 | □140 mm | to 160 mm | 12 µm L/S | ±7 µm | ihg line |
| UFX-2468 | □140 mm | to 160 mm | 7 µm L/S | ±7 µm | ih line |
| UFX-2477 | □140 mm | to 160 mm | 4 µm L/S | ±7 µm | i line |
