Excimer Lamp System

Powerful radiation in ultraviolet and vacuum ultraviolet spectral rangeAllows photochemical processes that were previously not possible with lamps
Single, narrow band wavelengthsSupports selected reactions with specificity not available from broadband sources Very efficient source of energy at the operating wavelength
Low temperature operationGenerates minimal infrared radiation, and allows processing of temperature sensitive substrates
Highly efficient sourceConverts power into light energy effectively, reducing power requirements and heat load
Instant On/OffProvides precise exposure control without mechanical devices Requires no warm-up or cool down time
Multiple operating positionsLamp can be operated in any orientation, providing system design flexibility
Multiple geometriesRadiation can be directed inwards or outwards Spot and wide area coverage designs are feasible

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